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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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Au/NiCr/Ta和Au/NiCr多层金属膜的划痕特征载荷
, PP. 407-410
Keywords: 划痕法,金属薄膜,临界载荷
Abstract:
采用摩擦力和声发射两种模式同时监测的划痕法研究了Au/NiCr/Ta和Au/NiCr多层金属薄膜的临界载荷Lc,并与TiN硬质薄膜进行了对比.实验结果表明摩擦力和声发射模式均能反映出压头进入不同金属膜层时的变化,在单一金属薄膜层中两者均无大的变化.对应实验范围内不同的沉积温度,拐点特征载荷值基本不受其影响,而主要取决于多层膜的层厚和层数.
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