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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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Au/NiCr/Ta多层金属膜的表面粗糙度和纳米压入硬度的研究
, PP. 449-452
Keywords: Au/NiCr/Ta多层膜,表面粗糙度,纳米压入
Abstract:
采用磁控溅射方法在Si-(111)基片上沉积Au/NiCr/Ta多层金属膜利用XRD分析晶体取向,SEM观察表面和断面形貌,AFM研究表面粗糙度,纳米压入研究薄膜硬度.结果表明薄膜表面粗糙度依赖于基体沉积温度,并且影响薄膜电阻和纳米硬度.
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