|
OALib Journal期刊
ISSN: 2333-9721
费用：99美元
|
|
|
|
刻蚀液中HF和H2O2的摩尔分数对Ag辅助化学刻蚀Si形貌的影响
DOI: 10.3724/SP.J.1037.2012.00734, PP. 989-995
Keywords: Si,Ag辅助化学刻蚀,减反射
Abstract:
采用扫描电镜和紫外-可见分光光度计研究了Ag粒子在小团聚条件下辅助化学刻蚀Si过程中,刻蚀剂HF和氧化剂H2O2的体积比对刻蚀孔隙结构和刻蚀速度的影响.结果表明,HF和H2O2的体积比对刻蚀Si中的孔隙生长速度和形貌有明显的影响,HF和H2O2的摩尔分数ρ=[HF]/([HF]+[H2O2])过低或过高均不利于孔隙的生长.当60%<ρ<80%时,Si可获得快速刻蚀,刻蚀速度为1050—1260nm/min.此时,孔隙密度高,孔径较大且相互连通,沿垂直Si表面生长.所获得的Si表面对200—1000nm波段太阳光的平均反射率可降至5.9%.此外,孔隙生长速度和形貌也与Ag颗粒的尺寸和形态密切相关.
| [1] | Kolasinski K W. Current Opinion Solid State Mater Sci, 2005; 9: 73
|
| [2] | Tsujino K, Matsumura M, Nishimoto Y. Sol Energy Mater Sol Cells, 2006; 90: 100
|
| [3] | Lehmann V. Electrochemistry of Silicon. Weinheim:Wiley-VCH, 2002: 31
|
| [4] | Sato N, Sakaguchi K, Yamagata K, Fujiyama Y, Yonehara T. J Electrochem Soc, 1995; 142: 3116
|
| [5] | Geyer N, Huang Z, Fuhrmann B, Grimm S, Reiche M, Nguyen-Duc T K, De Boor J, Leipner H S, Werner P, Gosele U.Nano Lett, 2009; 9: 3106
|
| [6] | Lee D H, Kim Y, Doerk G S, Labriante I, Maboudian R. J Mater Chem, 2011; 21: 10359
|
| [7] | Peng K Q, Lu A J, Zhang R Q, Lee S T. Adv Funct Mater, 2008; 18: 3026
|
| [8] | Peng K Q, Fang H, Hu J J, Wu Y, Zhu J, Yan Y J, Lee S.Chem--Eur J, 2006; 12: 7942
|
| [9] | Chattopadhyay S, Li X L, Bohn P W. J Appl Phys,2002; 91: 6134
|
| [10] | Tsujino K, Matsumura M. Electrochim Acta, 2007;53: 28
|
| [11] | Geng X W, He C L, Xu S C, Li J G, Zhu L J, Zhao L C.Prog Chem, 2012; 24: 1955
|
| [12] | (耿学文, 贺春林,徐仕翀, 李俊刚, 朱丽娟, 赵连城．化学进展, 2012; 24:1955)
|
| [13] | Li X, Bohn P W. Appl Phys Lett, 2000; 77: 2572
|
| [14] | Tsujino K, Matsumura M, Nishimoto Y. Sol Energy Mater Sol Cells, 2006; 90: 100
|
| [15] | Yae S, Kawamoto Y, Tanaka H, Fukumuro N, Matsuda H.Electrochem Commun, 2003; 5: 632
|
| [16] | Yae S, Tanaka H, Kobayashi T, Fukumuro N, Matsuda H.Phys Status Solidi, 2005; 2C: 3476
|
| [17] | Yae S, Kobayashi T, Kawagishi T, Fukumuro N, Matsuda H.Solar Energy, 2006; 80: 701
|
| [18] | Koynov S, Brandt M S, Stutzmann M. Appl Phys Lett,2006; 88: 203107
|
| [19] | Nishioka K, Horita S, Ohdaira K, Matsumura H. Sol Energy Mater Sol Cells, 2008; 92: 919
|
| [20] | Srivastava S K, Kumar D, Singh P K, Kar M, Kumar V, Husain M. Sol Energy Mater Sol Cells, 2010; 94: 1506
|
| [21] | Chartier C, Bastide S, Levy-Clement C. Electrochim Acta, 2008; 53: 5509
|
| [22] | Huang Z, Geyer N, Werner P, De Boor J, Cosele U.Adv Mater, 2011; 23: 285
|
| [23] | Yang X F. Master Thesis, Shenyang University,2013
|
| [24] | (杨雪飞．沈阳大学硕士学位论文, 2013)
|
| [25] | Tsujino K, Matsumura M. Adv Mater, 2005; 17: 1045
|
| [26] | Peng K Q, Hu J J, Yan Y J, Wu Y, Fang H, Xu Y, Lee S T, ZhuJ. Adv Funct Mater, 2006; 16: 387
|
| [27] | Bamwenda G R, Tsubota S, Nakamura T, Haruta M.Catal Lett, 1997; 44: 83
|
Full-Text
|
|
Contact Us
service@oalib.com QQ:3279437679 
WhatsApp +8615387084133
|
|
