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微型剪应力传感器的热特性分析

Keywords: 微电子机械系统,剪应力传感器,灵敏度,热敏元件

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Abstract:

研究不同结构、不同热敏元件温度和不同工作介质等情况下剪应力传感器的性能差异.通过实验和数值模拟相结合的方法对剪应力传感器进行了热特性分析.数值模拟结果发现:采用热敏元件下部埋置真空空腔的结构,隔热效果最佳;选择相对较高的热敏元件温度和较高热物性系数的工作气体有助于获得较高的灵敏度.该结果对优化设计微型剪应力传感器具有通用的指导意义.

References

[1]  Loefdahl L, Gad-el-Hak M. MEMS applications in turbulence and flow control[J]. Progress in Aerospace Sci-ences, 1999,351101 - 203.
[2]  Munson B H, Young D F, Okiishi T H. Fundamentals of fluid mechanics[M]. New York: Wiley, 2002.
[3]  Liu C, Tai Y C, Ho C M, et al. Surface micromachined thermal shear stress sensor [J].American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED, 1994,197 : 9 - 15.
[4]  Padmanabhan A, Goldberg H D, Breuer K S, et al. Silicon micromachined floating-element shear-stress sensor with optical position sensing by photodiodes[C] // Proceedings of International Conference on Solid-State Sensors and Actuators. Stockholm, Sweden: [s. n.], 1995:436 -439.
[5]  Huang J B, Jiang F K, Tai Y C, et al. MEMS-based thermal shear-tress sensor with self-frequency compensation[J]. Measurement Science and Technology, 1999, 101687 - 696.
[6]  Sheplak M, Chandrasekaran V, Cain A, et al. Characterization of a silicon micro-machined thermal shear-stress sensor[J]. AIAA Journal, 2002,40 ( 6 ) : 1099 - 1104.
[7]  Loefdahl L, Gad-el-Hak M. MEMS-based pressure and shear stress sensors for turbulent flows[J]. Meas Sci Technol, 1999,10:665 - 685.
[8]  丁英涛 仲顺安 谢君堂.微管道内剪应力传感器的研制与优化[J].北京理工大学学报,2007,27(3):251-254.
[9]  Menendez A N, Ramaprian B R. The use of flush- mounted hot-film gauges to measure skin friction in unsteady boundary layers[J]. Journal of Fluid Mechanics, 1985,161:139 - 159.
[10]  Beskok A, Karniadakis G E, Trimmer W. Rarefaction and compressibility effects in gas microflows[J]. Transactions of the ASME, 1996,118:448 - 456.
[11]  Ristic L. Sensor technology and devices[M]. Norwood: Artech House, 1994.

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