|
OALib Journal期刊
ISSN: 2333-9721
费用：99美元
|
|
|
|
用规整膜板对砷化镓的三维微结构图形加工刻蚀
, PP. 253-257
Keywords: 约束刻蚀剂层技术,GaAs,捕捉剂,微加工
Abstract:
以微齿轮图形结构作为规整模板,用约束刻蚀剂层技术对GaAs样品表面进行了加工刻蚀.在有捕捉剂H3AsO3存在的情况下,规则微齿轮图形能够很好地在样品表面复制.刻蚀结果与没有捕捉剂存在时的刻蚀结果做了比较.另外还测试了不同方法制得膜板的性能,初步探讨了电化学模板的制作工艺.
| [1] | [2 ] MandlerD ,BardAJ .Highresolutionetchingofsemiconductorsbythefeedbackmodeofthescanningelectro chemicalmicroscope [J].J .Electrochem .Soc .,1 990 ,1 37:2 46 8.
|
| [2] | TianZW ,FengZD ,TianZQ ,etal.Confinedetchantlayertechniquesfortwo_dimensionallithographyathighresolutionusingelectrochemicalscanningtunnelingMicroscope [J].FaradayDiscuss ,1 992 ,94:37
|
| [3] | [6 ] ZuYB ,XieL ,LuoJ ,MaoBW ,TianZW .Ontheetchingrevolutionofelectrochemicalmicro_(nano_)fab ricationtechnique_Itslimitandsolution[J].ChineseActaPhysico_ChimicaSinica ,1 997,1 3(1 1 ) :96 5 .
|
| [4] | [1 ] BardAJ ,FanF ._R .F ,PierceDTetal.Chemicalimageofsurfacewiththescanningelectrochemicalmicro scope[J].Science .1 992 ,2 5 4:6 8.
|
| [5] | [4 ] TianZW ,TianZQ ,LinZH ,XieZX .Micro_(nano_)fabricationtechniqueforthreedimensionalcomplexpatterns_theircommondifficultiesandsolution [J],ChineseJournalofScientificInstrument,1 996 ,1 7(1 ) :1 4.
|
| [6] | [5 ] ZuYB ,XieL ,MaoBW ,TianZW .Studiesonsiliconetchingusingtheconfinedetchantlayertechnique[J].Electrochim .Acta .1 998,43:1 6 83.
|
Full-Text
|
|
Contact Us
service@oalib.com QQ:3279437679 
WhatsApp +8615387084133
|
|
