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304L不锈钢钝化膜半导体性能研究

, PP. 348-352

Keywords: 电容测量法,半导体性能,杂质密度

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Abstract:

利用极化曲线、电容测量法和X射线光电子能谱(XPS)研究了304L不锈钢在0.5mol/LNaHCO3溶液中所形成的钝化膜的半导体性能,同时对影响钝化膜半导体性能的因素进行了讨论.结果表明在电位小于-0.4V范围内,膜呈p型半导体特性;当电位处于-0.4V至0.26V范围内膜呈n型半导体特性.随着测试频率的降低及成膜电位的负移,Mott-Schottky曲线的斜率减小,表明膜内的杂质密度增加。氯离子的加入使得MS直线的斜率减小,增加膜内的杂质密度,容易造成点蚀的发生.XPS测试结果表明钝化膜主要由内层的铬氧化物和外层的铁氧化物组成,这与以前的研究结果相一致.

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