Electrophysical Properties of Nanodimentional Pt Thin Films

The results of research structural and phase state, electrophysical properties (resistivity, temperature coefficient of resistance (TCR), strain gauge) of Pt thin films in the range of thicknesses from 7 to 50 nm were presented. Thin films Pt have fcc structure with lattice parameter = 0,390 nm after annealing. The temperature dependences characterized by relative large value of resistivity (ρ ~ 10-6 Ohm m) and relative small value of TCR (β ~10-4 K-1) respectively. Strain properties characterized by a wide interval of elastic deformation (more than 1%), relatively low value of gauge factor (1,5-3 units).