Determination of Chlorosilanes by Gas Chromatography
氯硅烷的气相色谱分析

Chlorosilanes are the essential raw material of SiC fibre made by "CVD (chemical vapour deposition)" method. The purity of chlorosilane affects the quality of SiC fibre obtained. Therefore, a simple and reliable method for the determination of the constituent of chlorosilane is needed. A gas chromatographic method for quantitative analysis of chlorosilane is described in this paper. The gas chromatographic conditions were as follows: column, 10% diethyl phthalate on 6201 support (60-80 mesh), 3m x 5mm i.d. stainless-steel column; column temp., 60 degrees C; injection temp., 110 degrees C; thermal conductivity detector temp., 140 degrees C carrier gas H2 with flow rate of 60 mL/min. The results show that the method is simple and rapid, and has good precision and reproducibility. The coefficient of variation of the method was less than 1% (n = 6).