Study of Structure and Tribological Properties in Vacuum of MoS2-Ti Composite Coatings Deposited by Unbalanced Magnetron Sputtering system
非平衡磁控溅射沉积MoS2-Ti 复合薄膜的结构与真空摩擦磨损性能研究

MoS2-Ti composite coatings are deposited by unbalanced magnetron sputtering system.The structure of the coatings has been studied by using SEM,XRD and XRF.The tribological behavior of the coatings changed with load,sliding speed and substrate materials is studied by using ball-on-disc tester in vacuum simulator.The results show that MoS2-Ti composite coatings are dense and uniform,with the cross-section of which has close columnar structure.XRD analysis reveals that the MoS2-Ti composite coatings are strong...