SYNTHESIZED AND MECHANICAL PROPERTY STUDY OF DOPED TITANIUM DIOXIDE FILM

In thispaper,the magnetronsputtering wasadoptedtosynthesize Ta5 doped Titanium dioxidefilms. Micro hardness and wear resistance of doped Titani um dioxide films was studied. The results showed that the doping element haveimproved the micro hardness and the wearability of TiO2 film ,and that the micro hardness wasalwaysimproved with theincreasingofthe dopingele mentdensity buttheimproved degreeofthe wearresistance wasdecreasingaf terincreasing and possessed an optimum valuein a certain densityfilm .