Research on knowledge evolution algorithm for semiconductor manufacturing equipment predicted maintenance scheduling
半导体制造设备预维修调度的知识进化算法研究*

The method based on Knowledge Evolution Algorithm was researched to solve the problem of Semiconductor Manufacturing Equipment Predicted Maintenance Scheduling. The detailed realization of the method was illustrated. The example of other literatures was computed. By comparison of the result, it can be found that this proposed algorithm illustrated its higher searching efficiency than the Particle Swarm Optimization Algorithem and First in first out(FIFO) method of other literatures.