PLASMA POLYMERIZATION OF METHANE AND POLYMER STRUCTURE
甲烷的等离子体聚合及聚合物结构的研究

In a capacitively coupled discharge with external electrodes, plasma polymerization of methane was studied. It was found that polymer deposition rate was accelerated when haloids were added in plasma, and effect of polymerization condition on the polymer deposition rate was confirmed at the same time. Results from IR, X-ray diffraction and elementary analysis show that plasma polymerized methane (PPM) has a cross-linked structure. PPM films have good thermostability. Refractive index and density of PPM films were determined byestablish-ed ellipitical polarization are 1.55 and 1.11 g/cm3respectively.