RESEARCH ON "CATHODE-ON-MEMBRANE" VACUUM MICROELECTRONIC PRESSURE SENSOR
阴极-敏感膜复合型真空微电子压力传感器研究

This paper proposes a novel "cathode-on-membrane" vacuum microelectronic pressure sensor. The "cathode-on-membrane" structure has been fabricated. The properties of the silicon membrane under pressure are simulated, and the effects of the parameters of membrame structure on the sensitivity are discussed.