A NEW TYPE OF CLOSED-FORM SPATIAL GREEN s FUNCTION AND ITS APPLICATION TO THE CAPACITANCE EXTRACTION OF THE 3-D INTERCONNECTS
一种新的闭式空域格林函数及其在三维互连结构电容参数提取中的应用

A general and efficient technique is presented for deriving the closed-form spatial Green's functions of 3-D Poisson equations in multilayered media. Based on the spectral-domain equivalent transmission line model of the layered Green's function, an efficient Krylov subs pace order-reduction technique is used to get, the rational approximation of the Green's function in the spectral-domain, then the spatial-domain Green's function is acquired directly via the residual theorem. The derived Green's function combined with MM can facilitate the capacitance extraction of the 3-D multilayered media and rnulticonductor interconnects. Numerical results have demonstrated the accuracy and efficiency of the proposed method.