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The structure and hydrogen storage characteristic of magnetron sputtering Ti--base alloy films
磁控溅射Ti合金薄膜结构特征及贮氢性能

Keywords: metallic materials,magnetron sputtering,Ti alloy film,hydrogen storage
金属材料
,磁控溅射,Ti合金薄膜,贮氢,磁控溅射,合金薄膜,结构特征,贮氢性能,films,alloy,magnetron,sputtering,storage,characteristic,hydrogen,室温,外推,吸氢平衡压,曲线,饱和吸氢量,现象,脱膜,吸氢动力学性能,膜材,工艺,偏差

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Abstract:

The magnetron sputtering method was used to prepare Ti-base alloy films. The concentration of the alloy elements such as Mo, Zr and Al in the films is consistent with that in the targets, while the Y concentration has a large deviation from that in the targets. The hydrogen absorption dynamics of the four films at 673 K is fine and the TiZrYAI film has the best hydriding activity. The hydrogen storage capacities of all the four films exceed 1.5 (H/M). The hydrogen absorption P-C isotherms of the films were measured. The films alloying with Mo have the highest hydrogen absorption equilibrium pressure, which is determined as about 10-4 Pa at ambient temperature.

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