Study of a New Pattern of Omni-Directional Reflector AlGaInP Thin-Film Light-Emitting Diodes
一种新型全方位反射AlGaInP薄膜发光二极管

A novel AlGaInP thin-film light emitting diode(LED)with an omni directional reflector structure is proposed and the corresponding fabrication process is developed.The omni-directional reflector was realized by the combination of a GaAs epi-wafer,SiO2 with conductive micro-contacts,and Au.The LED structure and Si substrate carrier were then brought into contact using silver-loaded epoxy.Then,the GaAs substrate was removed and stopped on the etching stop layer.After the etching stop layer was removed,a thin A...