An Air-Bridge Inter-Connection Method for Microwave and High Temperature Devices
微波和高温器件的一种空气桥互连方法

A flexible air-bridge method is proposed that is useful for high temperature microwave devices. This method makes use of different resists to give several resists as a sacrificial layer. After low temperature baking, a perfect arch sacrificial layer of bridges with a ratio higher than 60% is obtained. An air-bridge inter-connection structure with excellent characteristics and high reliability can be easily fabricated with this method.