Microfabrication and Evaluation of a Silicon MicroelectrodeBased on SOI Wafer
基于SOI硅片的硅微电极制作与评估

An implantable seven-channel silicon microelectrode was fabricated by MEMS(micro-electro-mechanical system)micromachining techniques for optic-nerve visual prosthesis applications.Theoretical analyses of noise contributed to de termining the size of the exposed recording sites of the microprobe.The geometr y configuration was optimized for the silicon microprobe to have enough strength and flexibility and to reduce the insertion-induced tissue trauma.Impedance t est results showed that the average value of ...