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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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Criteria for versatile GaN MOVPE tool: high growth rate GaN by atmosphericpressure growth
Koh Matsumoto, Kazutada Ikenag, Jun Yamamoto, Kazuki Naito, Yoshiki Yano, Akinori Ubukat, Hiroki Tokunag, Tadanobu Arimur, Katsuaki Cho, Toshiya Tabuchi, Akira Yamaguchi, Yasuhiro Harad, Yuzaburo Ban, Kousuke Uchiyama,
Keywords: MOVPE,GaN: AlGaN,atmospheric pressure growth,high growth rate
Abstract:
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