Rule of Oxidation Rate in Vertical Cavity Surface Emitting Lasers
垂直腔面发射激光器中氧化速率规律的研究

This research is based on the selective oxidation experiments under different conditions,in which the microstructure pictures and the component contents of the produced oxide in different depths are obtained.The oxidation rate is mainly controlled by diffusion;therefore,the experimental results are analyzed with the kinetics of thermal diffusion.It shows that the results of mathematical derivation are basically in agreement with the experimental results.Thus it is concluded that the concentration of oxidant is exponentially declined as the depth of oxidation in vertical cavity surface emitting lasers increases.