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半导体学报 2000
Quasi-Thermodynamic Model of MOVPE of InAlNKeywords: InAlN,MOVPE,thermodynamic model Abstract: Group - nitrides are very importantmaterials,which are applied to the fabrication ofgreen,blue and ultraviolet light emitting diodes(L EDs) and laser diodes(L Ds) 1 ] .Inx Al1 - xN alloy is a kind of promising material for Ga N- based...
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