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OALib Journal期刊
ISSN: 2333-9721
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Studies on the Butt-Joint of a InGaAsP-Waveguide Realized with Metalorganic Vapor Phase Epitaxy
MOCVD实现InGaAsP波导对接生长的研究

Keywords: MOCVD,butt-joint growth,waveguide
MOCVD
,对接生长,波导

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Abstract:

An InGaAsP waveguide is integrated laterally to MQW using LP-MOCVD butt-joint technology. High quality for the regrowth interface and material is achieved.The loss of the butt-jointed waveguide is 7cm-1.This demonstrates the applicability of butt-joint technology in fabricating high quality future photonic integrated circuits.

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