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Correlation Between Arsenide Precipitation and Dislocations in Undoped LEC GaAs Crystal
非掺杂LEC砷化镓晶体中砷沉淀和位错关联性质

Keywords: gallium arsenide,LEC,arsenide precipitation,micro-defects,dislocation distribution
砷化镓
,LEC,砷沉淀,微缺陷,位错分布

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Abstract:

Using the laser scattering method to measure a polished GaAs wafer,we find that there are four aggregation centers of arsenide precipitation in a GaAs crystal grown in a special thermal field1] and the aggregation centers are at precisely the positions where the dislocation density is at a minimum.In this article,we examine the correlation between the precipitation distribution of arsenide and the dislocations.We also explain what leads to the formation of the four arsenide precipitation aggregation center...

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