Design and Fabrication of Torsion Beam Actuator Based on Slanted Low Electrode
具有倾斜下电极的扭臂驱动结构的设计与制作

The relation between the applied voltage and the displacement at the end of upper electrode is studied.The actuator with the slanted low electrode is proposed and fabricated with certain tilting angle (111) silicon.Theoretical analysis and experiment results indicate that the pull in voltage based on the slanted low electrode actuator is half of that based on the flat low electrode.