Mach-Zehnder Electro-Optic Polymer Modulator with Corona Poled Core Layer
Mach-Zehnder型有机极化聚合物电光调制器(英文)

A Mach-Zehnder(MZ) electro-optic(EO) modulator are real iz ed,with three optical layers as polymer materials.The functional layer is the co rona poled crosslinkable polyurethane.The ridge waveguide is fabricated by using the spin-coating,poling,photolithography and oxygen reactive ion etching(RIE) techniques.The mode and the modulation properties of these devices are demonstra ted in a micron control system,while the light source works at the wavelength of 1 31 or 1 55 micron.