|
半导体学报 2001
Intermixing of Asymmetrical Coupling Double Quantum Well via Combinatorial Ion Implantation with Photo-Modulated Reflectance Spectrum
|
Abstract:
GaAs/AlGaAs asymmetrical coupling double quantum well (ACDQW) has been grown with molecule beam epitaxy (MBE).With combinatorial implantation methods,several areas with different implantation ion of As + and H + and different ion doses have been obtained on only a single substrate.Without rapid thermal annealing procedure,the maximum difference of transition energy in sub-bands is found to be 50meV from the photo-modulated reflectance spectra.