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半导体学报 2001
Dynamic Behaviour of Miniature Microphone with Corrugated Membrane:Top-down Design with EDA/CAD
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Abstract:
The optimization of a fabricated miniature microphone is presented by collecting the electrical network simulator PSPICE and the FEA(Finite Element Analysis)program ANSYS.After the simulation of the dynamic behaviour of miniature microphone with corrugated membrane by using EDA/CAD tools,optimal values of the related parameters are obtained.The optimized miniature microphone shows a flat frequency response in the audio frequency.The top down approach is also introduced to analyse the behaviour of the complex system and the interactions between different components in the design process.