Thermodynamic Study of Vapor Phase Epitaxy of In_xGa_(1-x)As Using An In-Ga Alloy Source
In-Ga合金源汽相外延生长In_xGa_(1-x)As体系的热力学分析

The vapor phase epitaxy of In_xGa_(1-x)As using an In-Ga alloy source has been studiedthermodynamically.Some useful conclusions for the technology have been obtained from thecalculations.