|
无机材料学报 1999
A New Sol-Gel Approach to Prepare MgO Thin Films
|
Abstract:
MgO thin films were successfully prepared on Si substrate by a novel and simple Sol-Gelmethod. The results indicated that collodion is a key element to form stable MgO sols. Thestructures of MgO films are closely related to the amount of collodion and the annealing temperature. In addition, the microstructures of the MgO thin films were examined with X-ray distraction(XRD), Atomic Force Morphology (AFM) and Transmission Electron Micrograph (TEM).