Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer
用于微型光谱仪的硅基多级微反射镜设计与制作研究木

A micro-spectrometer without moving parts that can be manufactured through micro-opto-electro-mechanical system techniques is developed,and the interference system is introduced. The fabrication of the micro multi-mirrors,which is the core part of the system,is investigated and wet etching of silicon in KOH solution is testified to be a good method. The root mean square surface roughness of the reflect surface made up of Si planes (111) through wet etching is less than 10 nm.