Electric field distribution in charge imbalance super junction
电荷非平衡super junction结构电场分布

2D analytic models for the electric field distribution of charge imbalance SJ structures, such as concentration and width imbalance, trapezoid n-/p- regions and lateral linearly graded doping have been presented. The comparison of the 2D analytic model with numerical device simulations shows that the proposed model can accurately predict electric field distribution. Although this solution is in the form of trigonometric series, some most important information also can be obtained from this solution. For example, the peak electric field and breakdown voltage in charge imbalance SJ structure can be obtained from the results of this paper.