GENERAL EQUATION OF FOUR PROBES METHOD FOR RESISTIVITY MEASUREMENT OF SEMICONDUCTOR MATERIALS
测量半导体材料电阻率的四探针公式的普遍形式

The equation of four probes method for resistivity measurement requires point contacts and a definite configuration of probes array. In fact, the contacts are always with definite dimension. In this article, we drive the equations of measuring resistivity and surface sheet resistance, taking into account the contact dimension and putting the location of the four probes arbitrary. The in-line four probes and the square array four probes are two specific examples for the equations.