Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon
酞菁锌/氢化非晶硅复合薄膜光电性质的研究

Composites consisting of hydrogenated amorphous silicon (a-Si:H, inorganic) and zinc phthalocyanine (ZnPc, organic) were prepared by vacuum evaporation of ZnPc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition (PECV