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半导体学报 2009
Effect of chemical polish etching and post annealing on the performance of silicon heterojunction solar cells
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Abstract:
Amorphous/crystalline silicon heterostructure solar cells have been fabricated by hot wire chemical vapor deposition (HWCVD) on textured p-type substrates. The influence of chemical polish (CP) etching and the post annealing process on the solar cell perf