Magnetic Force Microscopy Study of Alternate Sputtered (001) Oriented L10 Phase FePt Films
Magnetic Force Microscopy Study of Alternate Sputtered （001） Oriented L1o Phase FePt Films

We present a magnetic force microscopy study of alternate sputtered （001） oriented L1o phase FePt films. It is found that the root-mean-square value of phase shift of magnetic force images, （ △Ф）rms, can be used to characterize the perpendicular anisotropy for a series of specimens. Therefore, the considerable improvement of the perpendicular anisotropy after post-annealing can be characterized. In addition, the magnetic properties, magnetic and crystalline microstructures before and after post-annealing are compared for the typical Fe5nm Pt5 nm]10 film with substrate temperature T8 = 500℃, single layer thickness d = 5 nm and total layer thickness D=100 nm to confirm the effect of post-annealing on improving the perpendicular anisotropy for Fe-Pt films.