%0 Journal Article
%T Design and characterization of an RF plasma cleaner
%A Canal
%A G.P.
%A Luna
%A H.
%A Ruchko
%A L.F.
%A Galv£żo
%A R.M.O.
%J Brazilian Journal of Physics
%D 2010
%I Scientific Electronic Library Online
%R 10.1590/S0103-97332010000100015
%X the design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. the rf fields are produced by an antenna placed inside the metallic vacuum chamber. theoretical models are described to calculate both the electro-magnetic field structure and the spatial impurity distribution, due to erosion of the antenna. the electron energy distribution function is determined with a standard rf-filtered electrostatic probe; it is found that the plasma is well described by a druyvesteyn energy distribution function.
%K rf discharge
%K plasma cleaner
%K langmuir probe.
%U http://www.scielo.br/scielo.php?script=sci_abstract&pid=S0103-97332010000100015&lng=en&nrm=iso&tlng=en