%0 Journal Article %T Influ¨ºncia da limpeza pr¨¦via por sputtering na nitreta£¿£¿o por plasma de a£¿os inoxid¨¢veis %A Reis %A R. F. dos %A Neidert %A R. %J Mat¨¦ria (Rio de Janeiro) %D 2011 %I Rede Latino-Americana de Materiais - Latin-American Materials Network %R 10.1590/S1517-70762011000200004 %X samples of iso 5832-1 stainless steel were nitrided for 2h in a gas mixture of 50% vol. n2 and 50% vol. h2 at a temperature of 420 oc. before plasma treatment, the samples were cleaned by cathodic sputtering, in the reactor, using different parameters. the following analytical techniques were used: optical microscopy (om) and microhardness. the results showed that the use of a cleaning step by sputtering prior to processing can promote significant changes in the results obtained by plasma nitriding. it was also found that the use of hydrogen as a sputtering agent causes no change in the results compared to a processing performed without this cleanup step. %K plasma nitriding %K sputtering %K stainless steel. %U http://www.scielo.br/scielo.php?script=sci_abstract&pid=S1517-70762011000200004&lng=en&nrm=iso&tlng=en