%0 Journal Article
%T No Effect of Ar Eximer Lamp on Diamond-Like Carbon Deposition by Photo Chemical Vapor Deposition
%A Masato Ohmukai
%A Tomoya Matsumoto
%J World Journal of Engineering and Technology
%P 462-466
%@ 2331-4249
%D 2025
%I Scientific Research Publishing
%R 10.4236/wjet.2025.133029
%X Diamond-like carbon was deposited on glass substrates by a photo chemical vapor deposition method using methane and hydrogen gases as a starting material. Light from an Ar excimer lamp was tentatively applied to the deposition together with a mercury lamp. The experimental results show the effect of an Ar excimer lamp was not obtained, indicating that other condition is necessary to make use of the Ar excimer lamp.
%K Diamond-Like Carbon
%K Photo Chemical Vapor Deposition (CVD)
%K Ar Excimer Lamp
%U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=143834