%0 Journal Article
%T 基于圆孔光栅辅助微环谐振器的折射率传感研究<br> Research on Refractive Index Sensing Based on Circular Hole Grating Assisted Micro Ring Resonator
%A 杨天祺
%A 顾宏
%A 吴璇
%A 吴泓达
%J Journal of Sensor Technology and Application
%P 263-269
%@ 2331-0243
%D 2023
%I Hans Publishing
%R 10.12677/JSTA.2023.113029
%X 为了提高微环折射率传感器的灵敏度和品质因子，本文提出一种基于圆孔光栅辅助的微环谐振器。在该结构中由于同一种状态的光模式在不同的光路中产生模式劈裂而形成Fano共振现象，Fano共振的非对称线型光谱结构能够获得更高的消光比和品质因子，可以使该器件在进行折射率传感时对外界环境变化有非常好的响应。采用有限元法对结构进行设计和模拟仿真。仿真结果显示，所提结构的品质因子达到58,300，比传统微环谐振器提高7倍以上。<br />
In order to improve the sensitivity and quality factor of the micro ring refractive index sensor, this paper proposes a micro ring reso-nator based on circular hole grating. In this structure, Fano resonance phenomenon is formed due to the mode splitting of light modes in different light paths in the same state. The asymmetric linear spectral structure of Fano resonance can obtain higher extinction ratio and quality factor, which can make the device have a very good response to the external environment changes when conducting refractive index sensing. Design and simulate the structure using finite element method. According to the simulation results, the quality factor of the proposed structure reaches 58,300, which is more than 7 times higher than that of the traditional micro ring resonator.
%K 硅基，集成光学，微环谐振器，圆孔光栅，折射率传感<br> Silicon Based
%K Integrated Optics
%K Micro Ring Resonator
%K Circular Hole Grating
%K Refractive Index Sensing
%U http://www.hanspub.org/journal/PaperInformation.aspx?PaperID=65849