%0 Journal Article
%T 卷对卷电子束蒸镀高阻隔膜研究进展<br> Progress on Preparing High Barrier Films by Roll-To-Roll Electron Beam Evaporation
%A 陈捷豪
%A 贺涛
%A 陈星宇
%A 马赛
%A 刘莹
%A 王江涌
%A 徐从康
%J Material Sciences
%P 912-925
%@ 2160-7621
%D 2022
%I Hans Publishing
%R 10.12677/MS.2022.129102
%X 卷对卷电子束蒸发作为优秀的高阻隔膜制备工艺技术，兼顾了制备薄膜的致密性和高速成膜，受到国外各大高阻隔膜产商的青睐，然而，国内的卷对卷电子束蒸发高阻隔膜产业尚未形成，相关的研究也远落后于国外。本文对电子枪技术的发展、应用现状，以及对卷对卷电子束蒸发技术进行了介绍，并对卷对卷电子束制备高阻隔膜的关键技术工艺的现状进行了综述，对国产卷对卷电子束蒸镀高阻隔膜的发展进行了展望。<br />
As an excellent technique for preparation of high barrier films, roll-to-roll electron beam evaporation has the advantages of film compactness and high-speed film formation, and is favored by the foreign producers of high barrier films. While the domestic manu-facturer for high barrier films by roll-to-roll electron beam evaporation has not been well devel-oped, and the relevant research lags behind foreign countries. In this paper, the development and application status of electron gun and the roll-to-roll electron beam evaporation technique are in-troduced. The key technical parts and the domestic roll-to-roll electron beam evaporation system for preparing high barrier films are reviewed and prospected.
%K 电子束，高阻隔膜，卷对卷，发展现状<br> Electron Beam
%K High Barrier Film
%K Roll-To-Roll
%K Development Status
%U http://www.hanspub.org/journal/PaperInformation.aspx?PaperID=56397