%0 Journal Article
%T Structural and Functional Properties of the Thin Film System Ti¨CNi¨CSi
%J -
%D 2019
%R https://doi.org/10.1021/acscombsci.8b00181
%X The thin film system Ti¨CNi¨CSi was investigated using methods of combinatorial materials science. A thin film composition spread library of the system was fabricated using combinatorial magnetron sputtering. The functional properties Seebeck coefficient, electrical resistivity, and luminance were determined using high-throughput characterization techniques. A thin-film phase diagram was established by the assessment of high-throughput X-ray diffraction results. Correlations between composition, phase constitution, and functional properties with focus on the binary composition space are discussed
%U https://pubs.acs.org/doi/10.1021/acscombsci.8b00181