%0 Journal Article
%T Scalable fabrication of sub-10£¿nm polymer nanopores for DNA analysis
%J -
%D 2019
%R https://doi.org/10.1038/s41378-019-0050-9
%X We present the first fabrication of sub-10£¿nm nanopores in freestanding polymer membranes via a simple, cost-effective, high-throughput but deterministic fabrication method. Nanopores in the range of 10£¿nm were initially produced via a single-step nanoimprinting process, which was further reduced to sub-10£¿nm pores via a post-NIL polymer reflow process. The low shrinkage rate of 2.7£¿nm/min obtained under the conditions used for the reflow process was the key to achieving sub-10£¿nm pores with a controllable pore size. The fabricated SU-8 nanopore membranes were successfully employed for transient current measurements during the translocation of DNA molecules through the nanopores
%U https://www.nature.com/articles/s41378-019-0050-9