%0 Journal Article %T Fabrication and Characterization of Alq3 Thin Films %A A M Ardila %A D P G¨®mez %A J A Segura %A R. P. Adames %J - %D 2014 %R https://doi.org/10.17230/ingciencia.10.20.3 %X Alq3 (tris (8-hydroxyquinolate) aluminum) thin films were deposited on glass by thermal evaporation in order to establish the optimal evaporation rates of thin films deposited between 30 to 120nm on a substrate with temperatures between 60 and 120ˇăC. The thin films were characterized by SEM microscopy and perfilometry to compare the obtained thickness in-situ by quartz crystals; furthermore photoluminescence measures were made %K thin film %K thermal evaporation %K substrate %K characterization %K organic semiconductor %U http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2410