%0 Journal Article
%T Growth and characterization of MMA/SiO2 hybrid low-e£¿£¿£¿ thin films for interlayer dielectric applications
%A A M Mahajan
%A Bhavana N Joshi
%A M A More
%J -
%D 2010
%U https://www.ias.ac.in/describe/article/boms/033/03/0197-0201