%0 Journal Article
%T Application of MO calculation to plasma-enhanced CVD using organosilicon compounds
%A Atsushi Hozumi
%A Osamu Takai
%A Takashi Komori
%A Yasushi Inoue
%J -
%D 1997
%U https://www.ias.ac.in/describe/article/boms/020/06/0817-0822