%0 Journal Article %T Optimization of process parameter for synthesis of silicon quantum dots using low pressure chemical vapour deposition %A Dipika Barbadikar %A Jatin Bhatt %A Rajendra Patrikar %A Rashmi Gautam %A Sanjay Sahare %J - %D 2013 %U https://www.ias.ac.in/describe/article/boms/036/03/0483-0490