%0 Journal Article
%T Nanoindentation and AFM studies of PECVD DLC and reactively sputtered Ti containing carbon films
%A A Pauschitz
%A C Eisenmenger-Sittner
%A J Schalko
%A Manish Roy
%A S Kvasnica
%A T Koch
%J -
%D 2003
%U https://www.ias.ac.in/describe/article/boms/026/06/0585-0591