%0 Journal Article
%T Laser annealing of sputter-deposited e£¿£¿£¿-SiC and e£¿£¿£¿-SiCe£¿£¿£¤Ne£¿£¿| films
%A F D Origo
%A I C Oliveira
%A M A Fraga
%A M Massi
%A W Miyakawa
%J -
%D 2011
%U https://www.ias.ac.in/describe/article/boms/034/07/1375-1378