%0 Journal Article
%T Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model
%A Hiroshi Akatsuka
%J Advances in Physics: X
%D 2019
%R https://doi.org/10.1080/23746149.2019.1592707
%X ABSTRACT This paper describes the use of Optical Emission Spectroscopy (OES) to measure electron densities and temperatures in non-equilibrium plasmas. The ways to interpret relative line-intensities of neutral argon atoms are evaluated based upon a collisional-radiative model including atomic collisional processes. A conversion from an excitation temperature determined from relative line intensities assuming a Boltzmann population distribution to the thermal electron temperature in the electron temperature range 1¨C4 eV and electron density range 1010¨C1012 cm¨C3 is given. Procedures to obtain electron temperature Te and density Ne of non-equilibrium argon plasma by OES measurement with collisional radiative model. Graphical Abstrac
%U https://www.tandfonline.com/doi/full/10.1080/23746149.2019.1592707