%0 Journal Article
%T Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
%J Sensors | An Open Access Journal from MDPI
%D 2019
%R https://doi.org/10.3390/s19194346
%X This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 ¦Ìm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure. View Full-Tex
%U https://www.mdpi.com/1424-8220/19/19/4346